Comprehensive Static Characterization of Vertical Electrostatically Actuated Polysilicon Beams

Abstract The entire process of calibrating an electromechanical simulator – identifying relevant parameters, designing and measuring test structures, extracting parameters using detailed electromechanical simulations, and extrapolating the behavior of an actual device – is presented. The simulation model for electrostatically actuated beams is calibrated to a wide range of electrical and optical measurements of test structures, and is then used to predict the behavior of more complex dual-bias-electrode structures. Various mechanical discontinuities, and post-buckled pull-in behavior are addressed explicitly. Arbitrary fitting coefficients that limit generality are avoided. The well-characterized behavior of the dual-electrode structures can serve as verification test cases for evaluating coupled electromechanical simulators. Index terms electromechanical, polysilicon, material properties, buckling, gold